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Applications / Vacuum environment

  • Enables zero seek of carriers in high vacuum environment

    The client is an engineer with a maker of semiconductor manufacturing equipment. He consulted us on “zero seek” of workpieces inside vacuum film forming equipment. More >

  • Realizes workpiece seating confirmation in a high vacuum environment

    The client is an engineer with a maker of semiconductor manufacturing equipment. He consulted us on workpiece “seating confirmation” inside vacuum film forming equipment. More >

  • Replacement of optical fiber sensors reduced cost for workpiece positioning inside vacuum film forming equipment

    The client is an engineer in the semiconductor device industry. He consulted us “positioning” of the glass substrate inside vacuum film forming equipment. More >

  • Reliable wafer presence detection can be realized in a vacuum

    The client is an equipment manufacturer. A designer for semiconductor wafer delivery robots consulted us on wafer "presence detection". More >

  • Significantly reduced the cost for glass substrate alignment under vacuum environment

    The client is an engineer with a semiconductor equipment manufacturer. He consulted us on glass substrate alignment in a high vacuum. More >

  • Resolved a false detection of the photo sensor under high-vacuum environment

    A manufacturer of semiconductor manufacturing equipment that designs vacuum deposition devices to manufacture semiconductors for photovoltaic panels. A representative of substrate sensing parts design department inquired us about "positioning" of glass substrates under vacuum environment. More >

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