Applications / Accuracy improvement
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Detection of balancing microscopes in micron accuracy
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Detected the starting point of the stepper motor
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Realize positioning of glass substrate on conveyor
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The thermal displacement of the grinding stone has been corrected under harsh working conditions on the grinder where coolant splatters
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Contact type switch enables stable detection without being affected by external environments
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1mm minute actions of diaphragms can be detected stably
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Enables zero seek of carriers in high vacuum environment
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Corrected the Z-axis of a desktop robot in micron increments
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Reliable wafer presence detection can be realized in a vacuum
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A replacement of proximity sensors allows narrow mounting intervals without causing mutual interference
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Realize stable measurement under harsh environments inside CNC grining machine
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Correct the deviation of printing drums in micron increments
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Detected the deviation of the X-Y axes of the machining table with 0.5µm repeatability
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Realize precision positioning of the stepper motor driving stage
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Realization of high-accuracy positioning at low cost