High-vacuum Resistant Switches [GN]
10-5Pa
High vacuum class
compatible
Used for mask or wafer seating confirmation in vacuum deposition or sputtering systems by major semiconductor production system manufacturers and leading panel production users.
Adopts materials, adhesives and wiring supporting low out gas.
Related Applications
Enables zero seek of carriers in high vacuum environment
Realizes workpiece seating confirmation in a high vacuum environment
Replacement of optical fiber sensors reduced cost for workpiece positioning inside vacuum film forming equipment
Reliable wafer presence detection can be realized in a vacuum
Significantly reduced the cost for glass substrate alignment under vacuum environment
Resolved a false detection of the photo sensor under high-vacuum environment
Product Lineup
| Product No. | Output mode | Stroke | Cable direction | LED lamp |
Download | Price | Order | ||
|---|---|---|---|---|---|---|---|---|---|
| Catalog | CAD | ||||||||
 |
GN-PT5M3A | A: NO (Normally Open) |
1.5mm | Straight | No LED | 2D / 3D | 29040 JPY | ||
 |
GN-PT5M3A-R | A: NO (Normally Open) |
1.5mm | 90° | No LED | 2D / 3D | 29535 JPY | ||
 |
GN-PT5M3B | B: NC (Normally Close) |
1.5mm |
Straight |
No LED | 2D / 3D | 29040 JPY | ||
 |
GN-PT5M3B-R | B: NC (Normally Close) |
1.5mm | 90° | No LED | 2D / 3D | 29535 JPY | ||
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Specification
| Switch structure | Dry contact |
|---|---|
| Repeatability |
0.003mm (Range) (At operating speed 50-200mm/min)Numerical value, being used at normal temperature |
| Compatible vacuum | 10-5Pa |
| Allowable baking temperature | 120℃ |
| Pretravel | A: NO = 0.3mm |
| B: NC = 0 | |
| Protective structure | IP40 |
| Contact force | 0.5N |
| Contact life time | 3 million |
| Movement differential | 0 |
| Temperature drift | 0 (Because of no amplifier) |
| Case material | SUS 304 |
| Contact material | SUS HRC45 |
| Cable | Core-wire cable 0.5m×2 PTFE, AWG 30 |
| Oscillation | 10-55Hz total amplitude 1.5 for X, Y, Z each direction |
|---|---|
| Impact | 300m/s² for X, Y, Z each direction |
| Contact rating | DC5V-DC24V Steady current : 10 mA or less (Rush current: 20 mA or less) |
| Standard accessory | Two fixing nuts |
| Circuit diagram |  |